; CMOS technology file Low resistivity substrate (epi)

<chip>
        chipx = 512     ; dimensions of the chip in x direction
        chipy = 512     ; dimensions of the chip in y direction
        fftx  = 512     ; x-fft size (must be a power of 2)
        ffty  = 512     ; y-fft size
        TechFile = lowres.tek
        TechPath = .
        freq = 2.4              ; frequency of operation

<layer> 0                       ; bulk 
        rho = 0.02         ; ohm-cm
        t   = 200           ; microns
        eps = 11.7

<layer> 1						; epi
        rho = 5
        t   = 4.0
        eps = 11.7

<layer> 2						; ch-stop
        rho = 0.2
        t   = 0.8
        eps = 11.7

<layer> 3                       ; oxide
        rho = 1e10
        t   = 7.9
        eps = 3.9


<metal> 0
        layer = 3               ; in oxide layer
        rsh   = 70              ; sheet resistance mohm/sq
        t     = 0.665           ; thickness um
        d     = 1.21            ; distance from bottom of layer um
        name  = m1       
        color = yellow

<metal> 1
        layer = 3
        rsh   = 70 
        t     = 0.64
        d     = 2.876 
        name  = m2
        color = LightSkyBlue1

<metal> 2
        layer = 3
        rsh   = 70 
        t     = 0.64
        d     = 4.516 
        name  = m3
        color = medium purple

<metal> 3
        layer = 3
        rsh   = 40 
        t     = 0.925
        d     = 6.156 
        name  = m4
        color = light green

<via> 0                        ; metal 1 to metal 2
        top       = 1
        bottom    = 0
        r         = 1.18
        width     = 0.5
        space     = 0.45
        overplot1 = 0.2        ; to metal 1
        overplot2 = 0.2        ; to metal 2
        name      = via1
        color     = purple

<via> 1                        ; metal 2 to metal 3
        top       = 2
        bottom    = 1
        r         = 1.07
        width     = 0.5
        space     = 0.45
        overplot1 = 0.2
        overplot2 = 0.2
        name      = via2
        color     = cyan1

<via> 2                        ; metal 3 to metal 4
        top       = 3
        bottom    = 2
        r         = 1.09
        width     = 0.5
        space     = 0.45
        overplot1 = 0.2
        overplot2 = 0.2
        name      = via3
        color     = red