Redesign of a Silicon Wafer Slicing Saw Operator Interface

Summary

Human Factors Engineering Students, Ken Funk, and Ken Hartman

Department of Industrial and Manufacturing Engineering, Oregon State University

12 December 1996


Key words: human factors engineering, ergonomics, system development, silicon wafers, silicon ingots, wafer slicing saw, wafer slicing machine silicon wafer production.


Background

A wafer slicing saw is a machine used to slice silicon ingots into silicon wafers. It is key to an important step in the production of silicon wafers that go on to be used as raw material in the manufacture of integrated circuits. The Toyo T-SM-200A is an example of a wafer slicing saw. It is of relatively recent design, offers high levels of automation, and it is widely used in the industry.

Like any piece of manufacturing equipment, a wafer slicing saw should be designed with the characteristics, capabilities, and limitations of its human operator in mind. Only when this is done can the highest levels of system performance and safety be realized in operation.

Such a human-centered design process is the motivation for IE 442/542 and IE 443/543, human factors engineering courses offered by the Department of Industrial and Manufacturing Engineering at Oregon State University. In these courses, the students and instructors work together as a team to design or redesign a system in such a was that the operators, users, and maintainers are given adequate consideration in the design process. The project described in this document was undertaken winter and spring terms, 1996.

Objective

The objective of this project was to redesign the operator interface of the Toyo T-SM-200A silicon wafer slicing saw to facilitate operator/system performance and to enhance operator safety.

Approach

To accomplish this objective, we used a disciplined, systematic approach to human-machine system design. This approach involves the following steps:

A more detailed description of this process may be found in The Human-Machine System Development Process.

Throughout the development process, the team communicated via e-mail and regularly posted preliminary analysis and design results on an intranet.

Results

The results of this process yielded recommendations to modify the T-SM-200A's table and control system interface, which were implemented and evaluated in a full-scale mockup. The recommendations are summarized in Redesign of a Silicon Wafer Slicing Saw Operator Interface: Design Recommendations. The mockup is shown below.

More Information

For more details on the project, send mail to funkk@engr.orst.edu.

Note

See Mitsubishi Materials Silicon's excellent description of silicon wafer manufacturing.