Novel Materials and Devices Group: Facilities | ||
|
HOME RESEARCH TEACHING CV PUBLICATIONS PEOPLE FACILITIES STUDENT OPPORTUNITIES STUDENT OUTREACH SUPPORT HAVING FUN LINKS Group WIKI
|
Under construction... Installed August 2008: Picosun SUNALE R-150B 6" Atomic Layer Deposition (ALD) reactor with 1 Picosolid Booster, 1 Picosolid, and 3 Picosolution precursor sources. Recipes developed: Under development |
|
John F. Conley, Jr.: jconley@ eecs.oregonstate.edu, ph (541)737-9874, 3089 Kelley Engineering Center |
||